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Thermal Processing
Pawling provides unique inflatable seals made from
high-grade EPDM and silicone rubber materials. Pneuma-Seal is used
on the load locks and access doors in advanced vertical thermal processors
for 300 mm wafers. The 150 wafer load size of these processors supports
peak production by providing higher throughput at the lowest cost
per wafer. The inflatable seals resist both vacuum and positive pressure,
and replace traditional flat gasketing and O rings, thereby simplifying
the hardware and speeding the overall processing operation.
